Integrated Solutions Overview

Precision laser and inspection solutions for semiconductor and brittle materials

FARLEY LASERLAB provides semiconductor and brittle-material solutions covering wafer annealing, laser modification cutting, slotting, scribing, marking, defect detection, thickness measurement, and precision glass or ceramic processing.

1

Wafer Annealing

Backside metal annealing for SiC wafer device performance.

2

Wafer Cutting & Dicing

Modified cutting, stealth dicing, slotting, and scribing for semiconductor wafers.

3

Wafer Marking

Full-automatic wafer marking for identification and traceability.

4

Inspection & Measurement

Defect detection and thickness measurement for wafers, substrates, and epitaxial wafers.

5

Brittle Material Processing

Glass, quartz, optical glass, ceramic substrate, and other hard-brittle material cutting or drilling.

6

Manufacturing Support

Automation and smart factory support for semiconductor-related production.

Core Equipment

Wafer Laser Annealing

Wafer laser annealing supports backside metal annealing for SiC wafers through coordinated wafer handling, laser annealing, and precision motion control.

  • Supports SiC wafer backside metal annealing
  • Helps improve ohmic contact 
  • Designed for fully automated wafer processing
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SiC Wafer Modification and Cutting

SiC wafer modification and cutting solutions use custom ultrafast lasers, high-precision motion platforms, dynamic focus compensation, and vision positioning for stealth dicing and die separation.

  • Suitable for 6–8 inch wafers
  • Supports internal modification and die separation
  • Uses vision positioning and automated wafer handling
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Advanced SiC Processing

SiC processing supports fully automatic wafer modification and cutting for 6–8 inch wafers, using ultrafast lasers, high-precision CCD vision, dynamic focus compensation, and automated wafer handling.

  • Internal modification / stealth dicing
  • No front-side damage
  • Dynamic focus compensation
  • SEMI-standard automation
  • Supports advanced third-generation semiconductor manufacturing
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Wafer Laser Modified Cutting

Wafer laser modified cutting supports internal modified cutting of silicon-based wafers for 8-inch and above chip packaging and testing applications.

  • High-quality modified cutting
  • Small edge collapse and low surface damage
  • Supports high-efficiency wafer separation
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Wafer Slotting and Scribing

Wafer slotting and laser scribing solutions support precision processing for low-k wafers, silicon-based GaN wafers, GPP wafers, and silicon or compound semiconductor wafers.

  • Supports slotting and precision scribing
  • Suitable for semiconductor wafer processing
  • Covers nanosecond and picosecond scribing options
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Automatic Wafer Laser Slotting Intelligent Equipment

Automatic wafer laser slotting equipment can support precision slotting and advanced wafer processing scenarios within semiconductor manufacturing.

  • Wafer slotting
  • Precision laser processing
  • Semiconductor manufacturing support
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Wafer Marking and Traceability

Wafer laser marking solutions support full-automatic marking for semiconductor wafers using wafer handling, coaxial vision positioning, and laser marking technology.

  • Supports 2–6 inch wafer marking
  • Automatic positioning and edge finding
  • Supports identification and traceability
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Inspection & Measurement

Inspection and measurement support for semiconductor manufacturing

Inspection and measurement modules help support wafer quality control, substrate defect detection, and raw or epitaxial wafer size and flatness measurement.

Wafer Defect Detection

Semiconductor wafer defect detection equipment supports inspection of patterned wafers and wafer surfaces for scratches, cracks, color differences, metal residue, and other defects.

Value Points: Suitable for 4–8 inch patterned wafers | Detects multiple surface defects | Supports high-resolution inspection

Recommended Products: Wafer Defect Detection Series

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Substrate Defect Detection

Semiconductor substrate defect detection equipment supports defect inspection for wafers, substrates, epitaxial wafers, and patterned wafers.

Value Points: Applicable to multiple wafer and substrate types | Detects particles, pits, scratches, stains, and cracks | Supports upstream and midstream quality control

Recommended Products: Defect Detection Series | Semiconductor Substrate Defect Detection Equipment

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Wafer Thickness Measuring

Wafer thickness measuring equipment uses spectral confocal measurement to detect the size and flatness of semiconductor raw and epitaxial wafers.

Value Points: Supports raw and epitaxial wafer measurement | Focuses on size and flatness detection | Suitable for upstream semiconductor material production

Recommended Products: Wafer Thickness Measuring Series

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Brittle Materials

Glass and Quartz Micro-Perforation

Glass and quartz micro-perforation solutions support high-yield processing of hard-brittle materials using picosecond or short-pulse laser technology.

Suitable for glass and quartz

Supports micro-perforation

Designed for stable continuous processing

Glass and Optical Material Cutting

Glass and optical material laser cutting solutions support precise, non-contact processing for brittle materials such as cover glass, optical glass, and related components.

Non-contact cutting

Supports complex shapes

Suitable for glass and optical material processing

Glass Laser Welding for Transparent Materials

Ultrafast laser welding can support bonding of glass and transparent brittle materials without additional adhesives in selected precision manufacturing scenarios.

Transparent material welding

No additional adhesive

Low thermal impact

Ceramic Substrate Laser Cutting

Ceramic substrate laser cutting solutions support high-efficiency and high-precision automatic processing for alumina, zirconium oxide, aluminum nitride, silicon nitride, and other ceramic materials.

Suitable for ceramic substrates

Supports automatic loading and unloading

High-speed and high-precision processing

Smart Manufacturing

Semiconductor Intelligent Manufacturing Support

FARLEY LASERLAB supports semiconductor-related intelligent manufacturing through equipment, inspection, automation, and smart factory capabilities for laser processing and quality control.

  • Smart Factory
  • Inspection Integration
  • Data-connected Manufacturing Support
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Why FARLEY LASERLAB

Precision laser and inspection capabilities for semiconductor and brittle materials

FARLEY LASERLAB combines wafer annealing, wafer cutting, marking, defect detection, thickness measurement, and brittle-material processing to support semiconductor and precision electronics manufacturing.

Support Cards: Wafer Processing — Annealing, cutting, slotting, scribing, and marking | Inspection & Measurement — Defect detection and thickness measurement | Brittle Material Processing — Glass, quartz, optical glass, and ceramic substrate processing

How We Solve It
Contact

Discuss semiconductor wafer and brittle-material processing solutions

Connect with our team to explore wafer processing, inspection, measurement, and hard-brittle material laser solutions.

Contact Sales View Semiconductor Products

Related Products / Solutions

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.

MARVEL Series laser cutting machine delivers excellent cutting precision and high processing speed. The machine produces a very small heat-affected zone, helping to maintain material stability and prevent deformation during cutting. It is suitable for processing a variety of metal materials, including stainless steel, carbon steel, aluminum alloy, iron, and other metal sheets, making it a versatile solution for many manufacturing applications. Price Range: USD $15,000 – USD $35,000.